Title | ||
---|---|---|
Heuristic algorithms to solve the capacity allocation problem in photolithography area (CAPPA) |
Abstract | ||
---|---|---|
Wafer fabrication is one of the most complex and high competence manufacturing. How to fully utilize the machine capacity
to meet customer demand is a very important topic. In this paper, we address the capacity allocation problem for photolithography
area (CAPPA), which belongs to a capacity requirement planning scheme, with the process window and machine dedication restrictions
that arise from an advanced wafer fabrication technology environment. Process window means that a wafer needs to be processed
on machines that can satisfy its process capability (process specification). Machine dedication means that once the first
critical layer of a wafer lot is processed on a certain machine, the subsequent critical layers of this lot must be processed
on the same machine to ensure good quality of final products. We present six modified heuristics and a linear-programming-based
heuristic algorithm (LPBHA) to solve the problem efficiently. The performance of the proposed algorithms is tested using real-world
CAPPA cases taken from wafer fabrication photolithography area. Computational results show that LPBHA is the most effective
one, and with a least average and a least standard deviation of deviation ratio of 0.294 and 0.085% compared to the lower
bound of the CAPPA. |
Year | DOI | Venue |
---|---|---|
2008 | 10.1007/s00291-007-0093-4 | Or Spektrum |
Keywords | Field | DocType |
satisfiability,linear program,standard deviation,linear programming,lower bound,process capability,heuristic algorithm,heuristic | Process capability,Wafer,Economics,Heuristic,Mathematical optimization,Heuristic (computer science),Wafer fabrication,Process window,Algorithm,Heuristics,Linear programming,Operations management | Journal |
Volume | Issue | ISSN |
30 | 3 | 0171-6468 |
Citations | PageRank | References |
3 | 0.74 | 3 |
Authors | ||
3 |
Name | Order | Citations | PageRank |
---|---|---|---|
Shu-Hsing Chung | 1 | 119 | 10.75 |
Chun-Ying Huang | 2 | 589 | 39.51 |
Amy H. I. Lee | 3 | 191 | 15.21 |