Name
Abstract | ||
|---|---|---|
Microelectromechanical Systems (MEMS) have been proposed as DCelectrical metrology references. The design reported here is thefirst to enhance the qualities of a MEMS DC reference withpotential tuning and sensing via an isolated and monolithicallyintegrated MEMS technology and thereby, convert a stableparallel-plate voltage reference to a simple, sensitive, low-burdenvoltage sensor. This on-chip system reliably measures unknownpotentials ranging from −60 to 60V with sampling times lessthan 10 ms. In the initial design, the system is used to measureatto-amp leakage current though 10 PΩ, suspended, MEMSisolation. |
Year | DOI | Venue |
|---|---|---|
2007 | 10.1504/IJISTA.2007.014132 | IJISTA |
Keywords | Field | DocType |
monolithicallyintegrated mems technology,mems parallel-plate pull-in,sampling times lessthan,low-burdenvoltage sensor,mems dc reference withpotential,microelectromechanical systems,on-chip electrometer,on-chip system,stableparallel-plate voltage reference,initial design,dcelectrical metrology reference,voltage reference,electrometer,chip | Direct current,System on a chip,Electrometer,Microelectromechanical systems,Leakage (electronics),Voltage reference,Metrology,Voltage,Control engineering,Engineering,Electrical engineering | Journal |
Volume | Issue | Citations |
3 | 1/2 | 0 |
PageRank | References | Authors |
0.34 | 0 | 2 |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Russell Y. Webb | 1 | 6 | 2.86 |
| Noel C. Macdonald | 2 | 62 | 9.72 |