Name
Year | DOI | Venue |
|---|---|---|
2011 | 10.1109/CASE.2011.6042425 | CASE |
Keywords | Field | DocType |
semiconductor manufacturing,semiconductor devices,scanning electron microscope,logistics,feedback control,learning artificial intelligence,mathematical model,quality control,machine learning,metrology,statistical model,regression analysis | Multi-task learning,Industrial engineering,Regression analysis,Lasso (statistics),Metrology,Semiconductor device fabrication,Control engineering,Virtual metrology,Statistical model,Engineering,Dimensional metrology | Conference |
Citations | PageRank | References |
9 | 1.68 | 3 |
Authors | ||
4 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| Simone Pampuri | 1 | 84 | 10.20 |
| Andrea Schirru | 2 | 45 | 7.98 |
| Giuseppe Fazio | 3 | 9 | 1.68 |
| Giuseppe De Nicolao | 4 | 738 | 76.26 |