Title
A low-noise interface circuit for MEMS cochlea-mimicking acoustic sensors.
Abstract
This paper proposes a low-noise MEMS interface circuit which has very small parasitic capacitance at the input node. The circuit presented is suitable for the MEMS cochlea-mimicking acoustic sensors which are highly parasitic-sensitive due to their low intrinsic sensing capacitance. In order to reduce the electronic noise of the interface circuit, chopper stabilization technique is implemented, and an effective method to optimize the critical transistor size for best noise performance is derived. Simulation results show that, for a MEMS sensing structure with 200 fF static capacitance, the interface circuit achieves a 0.72 aF equivalent capacitance noise floor over 100 Hz to 20 kHz audio bandwidth.
Year
DOI
Venue
2012
10.1109/ISCAS.2012.6271436
ISCAS
Keywords
Field
DocType
sensors,noise,transistors,parasitic capacitance
Capacitance,Noise floor,Parasitic capacitance,Microelectromechanical systems,Computer science,Noise (electronics),Electronic engineering,Chopper,Transistor,Electrical engineering,Differential capacitance
Conference
ISSN
ISBN
Citations 
0271-4302
978-1-4673-0218-0
1
PageRank 
References 
Authors
0.38
6
8
Name
Order
Citations
PageRank
Shiwei Wang110.38
Thomas Jacob Koickal2446.55
Alister Hamilton311719.02
E. Mastropaolo492.02
Rhonira Latif561.49
R. Cheung671.87
Michael J. Newton710.38
Leslie S. Smith836340.34