Name
Abstract | ||
|---|---|---|
This paper presents a scheduling algorithm for an in-line stepper in low-yield scenarios, which mostly appear in cases when new process/production is introduced. An in-line stepper is a bottleneck machine in a semiconductor fab. Its interior comprises a sequence of chambers, while its exterior is a dock equipped with several ports. The transportation unit for entry of each port is a job (a group of wafers), while that for each chamber is a piece of wafer. This transportation incompatibility may lead to a capacity-loss, in particular in low-yield scenarios. Such a capacity-loss could be alleviated by effective scheduling. The proposed scheduling algorithm, called GA-Tabu, is a combination of a genetic algorithm (GA) and a tabu search technique. Numerical experiments indicate that the GA-Tabu algorithm outperforms seven benchmark ones. In particular, the GA-Tabu algorithm outperforms a prior GA both in solution quality and computation efforts. |
Year | DOI | Venue |
|---|---|---|
2009 | 10.1016/j.eswa.2009.03.064 | Expert Syst. Appl. |
Keywords | Field | DocType |
scheduling algorithm,in-line stepper,genetic algorithm,meta-heuristic algorithm,in-line steppers,prior ga,semiconductor,ga-tabu algorithm,transportation incompatibility,port capacity constraints,scheduling,transportation unit,tabu search,flow shop,low-yield scenario,effective scheduling,proposed scheduling algorithm,heuristic algorithm | Lottery scheduling,Mathematical optimization,Fair-share scheduling,Computer science,Scheduling (computing),Flow shop scheduling,Algorithm,Two-level scheduling,Rate-monotonic scheduling,Dynamic priority scheduling,Tabu search | Journal |
Volume | Issue | ISSN |
36 | 9 | Expert Systems With Applications |
Citations | PageRank | References |
3 | 0.42 | 13 |
Authors | ||
2 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| Chie-Wun Chiou | 1 | 10 | 1.24 |
| Muh-Cherng Wu | 2 | 227 | 16.58 |