Name
Year | DOI | Venue |
|---|---|---|
2012 | 10.1109/ESSDERC.2012.6343353 | ESSDERC |
Keywords | Field | DocType |
deformation | Substrate (chemistry),Wafer,Oxide,Thermal oxidation,Chip,Electronic engineering,Membrane,Deformation (mechanics),Materials science,Silicon | Conference |
Citations | PageRank | References |
3 | 0.74 | 1 |
Authors | ||
10 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| Evangelos A. Angelopoulos | 1 | 3 | 0.74 |
| Muhammad S. Al-Shahed | 2 | 3 | 0.74 |
| Wolfgang Appel | 3 | 3 | 0.74 |
| Stefan Endler | 4 | 4 | 2.45 |
| Saleh Ferwana | 5 | 3 | 0.74 |
| Christine Harendt | 6 | 24 | 4.40 |
| Mahadi-Ul Hassan | 7 | 3 | 0.74 |
| Horst Rempp | 8 | 4 | 1.11 |
| Martin Zimmermann | 9 | 9 | 5.98 |
| Joachim N. Burghartz | 10 | 29 | 5.70 |