Title
Breakdown characterization of gate oxides in 35 and 70 Å BCD8 smart power technology
Abstract
The breakdown of 35Å and 70Å thick NMOS and PMOS silicon Gate oxides used in 1.8V and 3.3V BCD8 Smart Power technological node was investigated in this work. Both voltage to breakdown, from DC down to the ESD time domain, and time-dependent breakdown analysis have been carried out. We present also the evidence that breakdown is not affected by cumulative stress and it is mainly driven by voltage stress.
Year
DOI
Venue
2009
10.1016/j.microrel.2009.07.020
Microelectronics Reliability
Keywords
Field
DocType
cumulant,time domain
NMOS logic,Electrostatic discharge,Voltage,Electronic engineering,Breakdown voltage,Time-dependent gate oxide breakdown,Gate oxide,Engineering,PMOS logic,Avalanche diode
Journal
Volume
Issue
ISSN
49
9
0026-2714
Citations 
PageRank 
References 
0
0.34
0
Authors
4
Name
Order
Citations
PageRank
Augusto Tazzoli163.19
L. Cerati211.50
A. Andreini300.34
Gaudenzio Meneghesso46738.27