Title
ESD sensitivity investigation on a wide range of high density embedded capacitors
Abstract
This work presents some results from electrical (TDDB, TLP, HBM and MM) measurements and ESD calculations/simulations on passive components such as capacitors. In a SIP context, the ESD sensitivity of innovative 3D capacitors is studied. A method to predict the failure threshold of a wide range of capacitor values under ESD events is presented and validated by measurement on silicon. This method consists of using the basic equation of the charge conservation for capacitors in parallel that is adapted to the model of the ESD event.
Year
DOI
Venue
2008
10.1016/j.microrel.2008.07.023
Microelectronics Reliability
Field
DocType
Volume
Human-body model,Charge conservation,Capacitor,Electrostatic discharge,High density,Electronic engineering,Time-dependent gate oxide breakdown,Engineering,Electronic component,Silicon
Journal
48
Issue
ISSN
Citations 
8
0026-2714
1
PageRank 
References 
Authors
0.63
0
2
Name
Order
Citations
PageRank
Frederic Barbier110.63
Sebastien Jacqueline210.63