Paper Info
Title
Design and characterization of liquid crystal polymer membrane MEMS sensors for underwater sensing applications: A biomimetic of lateral-line fish sensing
Abstract
The paper presents the design, fabrication and experimental results of a liquid crystal polymer (LCP) membrane-based pressure sensor array for underwater sensing applications. An artificial lateral-line has been developed, mimicking the features of the functions of the superficial neuromast in a fish. A simple, low cost and robust sensor has been proposed for harsh underwater environment applications. The main features of the sensor developed in this work are an LCP membrane with integrated thin film gold piezoresistors deposited on it. The sensor has been tested for both air and water flow sensing and for underwater object detection. The sensor demonstrates a good sensitivity of 3.695 mV/ms-1, large operating range (0 to >; 10 ms-1 and 0 to >; 70 cms-1 for air flow and water flow, respectively) and good accuracy in measuring both air and water flow velocities with an average error of only 3.6% of full-scale in comparison with theory.
Year
DOI
Venue
2011
10.1109/ROBIO.2011.6181450
Robotics and Biomimetics
Keywords
Field
DocType
autonomous underwater vehicles,biomimetics,flow sensors,liquid crystal polymers,membranes,microsensors,object detection,piezoresistive devices,pressure sensors,resistors,sensor arrays,thin film sensors,LCP membrane-based pressure sensor array,air flow sensing,air flow velocity,artificial lateral-line,biomimetic,harsh underwater environment applications,integrated thin film gold piezoresistors,lateral-line fish sensing,liquid crystal polymer membrane MEMS sensors,low cost sensor,robust sensor,sensitivity,superficial neuromast,underwater object detection,underwater sensing applications,water flow sensing,water flow velocity
Nanotechnology,Water flow,Biomimetics,Control engineering,Pressure sensor,Airflow,Resistor,Engineering,Thin film,Optoelectronics,Fabrication,Underwater
Conference
ISBN
Citations 
PageRank 
978-1-4577-2136-6
0
0.34
References 
Authors
1
5
Name
Order
Citations
PageRank
Ajay Giri Prakash Kottapalli132.65
Chee Wee Tan21766.30
Jianmin Miao378.41
George Barbastathis4253.10
Michael S. Triantafyllou5252.97