Name
Title | ||
|---|---|---|
Full fabrication simulation of 300mm wafer focused on AMHS (automated material handling systems) |
Abstract | ||
|---|---|---|
Semiconductor fabrication lines are organized using bays, equipment, and stockers. Most 300mm wafer lines use AMHS (Automated Material Handling System) for inter-bay and intra-bay lot transportation. In particular, the inter-bay AMHS moves lots between stockers, whereas intra-bay AMHS moves lots between stockers and tools, or between tools within the same bay. The key concern for manufacturer is how to raise productivity and to reduce turn-around time. This paper presents a simulation to reduce turn around time and raise productivity by reducing the delivery time (which affects AMHS). |
Year | DOI | Venue |
|---|---|---|
2004 | 10.1007/978-3-540-30585-9_57 | asian simulation conference |
Keywords | Field | DocType |
automated material handling system,inter-bay amhs,turn-around time,wafer line,semiconductor fabrication line,full fabrication simulation,delivery time,intra-bay lot transportation,intra-bay amhs,key concern | Wafer,Simulation,Semiconductor device fabrication,Manufacturing engineering,Material handling,Turnaround time,Engineering,Fabrication | Conference |
Volume | ISSN | Citations |
3398 | 0302-9743 | 3 |
PageRank | References | Authors |
0.63 | 1 | 4 |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Youngshin Han | 1 | 27 | 8.28 |
| Dongsik Park | 2 | 13 | 2.76 |
| Sangwon Chae | 3 | 9 | 1.44 |
| Chil-Gee Lee | 4 | 47 | 16.85 |