Title
Early prediction of product performance and yield via technology benchmark
Abstract
This paper presents a practical method to estimate IC product performance and parametric yield solely from a well-chosen set of existing electrical measurements intended for technology monitoring at an early stage of manufacturing. We demonstrate that the components of mmWave PLL and product-like logic performance in a 65 nm SOI CMOS technology are predicted within a 5% RMS error relative to mean.
Year
DOI
Venue
2008
10.1109/CICC.2008.4672059
CICC
Keywords
Field
DocType
process monitoring,cmos integrated circuits,integrated circuit technology,ic product yield,integrated circuit manufacture,ic product performance,mmwave pll,ic technology monitoring,phase locked loops,silicon-on-insulator,ic manufacturing,soi cmos technology,integrated circuit yield,product-like logic performance,millimetre wave devices,rms error,electrical measurements,ic technology benchmark,silicon on insulator,estimation,testing
Silicon on insulator,Phase-locked loop,Computer science,Electrical measurements,CMOS,Electronic engineering,Parametric statistics,Root-mean-square deviation,Frequency conversion,Soi cmos technology
Conference
ISBN
Citations 
PageRank 
978-1-4244-2019-3
1
0.39
References 
Authors
3
5
Name
Order
Citations
PageRank
Choongyeun Cho1406.76
Daeik D. Kim2275.49
Jonghae Kim310114.95
Daihyun Lim443454.59
Sangyeun Cho5129473.92