Name
Abstract | ||
|---|---|---|
With its outstanding ultra-precise resolution, the heterodyne laser interferometer systems are commonly used in semiconductor manufacturing industry. However, the periodical nonlinearity error caused from frequency-mixed cross talks limits the accuracy in nanometer scale. In this paper to improve the accuracy of laser interferometer system, we propose an adaptive nonlinearity compensation algorithm using RLS (recursive least square) method. As a reference signal, the capacitance displacement sensor mounted on a linear piezo-electric transducer gives a feedback information on how to transform the elliptical phase into a circular one. |
Year | DOI | Venue |
|---|---|---|
2006 | 10.1007/11893004_71 | KES (2) |
Keywords | Field | DocType |
linear piezo-electric transducer,laser interferometer system,feedback information,elliptical phase,capacitance displacement sensor,nanometer scale,heterodyne laser interferometer system,frequency-mixed cross talk,periodical nonlinearity error,adaptive nonlinearity compensation algorithm,semiconductor manufacturing | Transducer,Least squares,Nonlinear system,Capacitance,Adaptive system,Optics,Interferometry,Laser,Heterodyne,Physics | Conference |
Volume | ISSN | ISBN |
4252 | 0302-9743 | 3-540-46537-5 |
Citations | PageRank | References |
1 | 0.75 | 0 |
Authors | ||
4 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| Minsuk Hong | 1 | 1 | 1.09 |
| Jaewook Jeon | 2 | 5 | 2.25 |
| Kiheon Park | 3 | 7 | 5.48 |
| Kwan-Ho You | 4 | 11 | 4.20 |