Name
Title | ||
|---|---|---|
Design of a novel low cross-axis sensitivity micro-gravity sandwich capacitance accelerometer |
Abstract | ||
|---|---|---|
This paper presents a novel design of the highly symmetric beam-mass structure for out-of-plane differential capacitance accelerometer. In this design, the thick proof mass is mirror symmetrically suspended by eight L-shape beams form both top and bottom sides. By this approach, the sensing mode of the accelerometer is successfully decoupled from other variation modes without tradeoff between sensing capacitance and structure flexibility. Accelerometer adopting this structure achieves a differential capacitance sensitivity of 54.38pF/g. The capacitance instability is 0.95μg (30min) in normal pressure, and the close-loop sensitivity is 1.01 v/g. |
Year | DOI | Venue |
|---|---|---|
2011 | 10.1109/NEMS.2011.6017437 | NEMS |
Keywords | Field | DocType |
cross-axis sensitivity,low cross-axis sensitivity microgravity sandwich capacitance accelerometer,capacitive sensors,accelerometer,microsensors,mems,close-loop sensitivity,differential capacitance sensitvity,beams (structures),sensing capacitance,thick proof mass,highly symmetric beam-mass structure,l-shape beam form,mirror symmetric,accelerometers,out-of-plane differential capacitance accelerometer | Proof mass,Capacitance,Microelectromechanical systems,Accelerometer,Instability,Electronic engineering,Capacitive sensing,Beam (structure),Optoelectronics,Materials science,Differential capacitance | Conference |
Volume | Issue | ISBN |
null | null | 978-1-61284-775-7 |
Citations | PageRank | References |
0 | 0.34 | 0 |
Authors | ||
5 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| Qifang Hu | 1 | 0 | 1.01 |
| Chengchen Gao | 2 | 11 | 3.74 |
| Yangxi Zhang | 3 | 0 | 1.35 |
| Jian Cui | 4 | 3 | 4.27 |
| Yilong Hao | 5 | 12 | 4.49 |