Paper Info
Title
Using A Multiagent Scheduling System For Dedicated Machine Constraint In Semiconductor Manufacturing
Abstract
We present a Multiagent Scheduling (MS) system to tackle the dedicated machine constraint in this paper. The dedicated machine constraint is one of the new issues of the photolithography machinery due to natural bias. Natural bias will impact the alignment of patterns between different photolithography layers. The dedicated machine constraint is the most important challenge to improve productivity and fulfill the request for customers in semiconductor manufacturing today. In this paper, the proposed MS system is based on a Resource Schedule and Execution Matrix (RSEM) and keeps the load balancing among photolithography machines during each scheduling step according to the current load among the photolithography machines in the production line. We describe the prototype system including the agents and the coordination strategies in the paper. We also demonstrate the simulation result that validated the proposed MS system.
Year
DOI
Venue
2006
10.1109/ICSMC.2006.384621
2006 IEEE INTERNATIONAL CONFERENCE ON SYSTEMS, MAN, AND CYBERNETICS, VOLS 1-6, PROCEEDINGS
Keywords
DocType
ISSN
semiconductor manufacturing,multi agent systems,load balance,load balancing,scheduling
Conference
1062-922X
Citations 
PageRank 
References 
4
0.49
9
Authors
4
Name
Order
Citations
PageRank
Alan Liu114917.19
Peter P. Chen210271122.69
Arthur M. D. Shr3163.73
Yen-Ru Cheng461.58