Paper Info
Title
The Teaching of Microelectromechanical Systems (MEMS)
Abstract
MEMS technology is now where integrated circuit technology was about 30 years ago. It is clearly going to be pervasively important. Both commercial volume and patents on MEMS are growing at rates exceeding 20% annually. The teaching of MEMS technology, now in its early stages, must keep pace. Most universities with an engineering program will have to teach MEMS technology starting within the next decade. This paper summarizes the state of the MEMS instruction regarding available texts and other materials, and especially current short courses and ordinary university courses. Two courses on the production and applications of MEMS, which are planned for the George Washington University (USA) in the coming academic year, are outlined. Possibilities for laboratory courses on MEMS are also presented
Year
DOI
Venue
1999
10.1109/MSE.1999.787054
Arlington, VA
Keywords
Field
DocType
mems instruction,current short course,mems technology,ordinary university course,microelectromechanical systems,early stage,coming academic year,available text,integrated circuit technology,commercial volume,engineering program,integrated circuit,silicon,applications,production,etching
Computer architecture,Pace,Microelectromechanical systems,Engineering program,Academic year,Electronic engineering education,Manufacturing engineering,Engineering,Integrated circuit,Electrical engineering
Conference
ISBN
Citations 
PageRank 
0-7695-0312-8
0
0.34
References 
Authors
0
2
Name
Order
Citations
PageRank
Mona E. Zaghloul17319.65
David J. Nagel2443.77