Paper Info
Title
The SAW resonators on LiNb03 for mass-sensing applications
Abstract
A mass-loading effect SAW resonator with shorted synchronously reflectors is presented in this work. The input and output Interdigital Transducer (IDT) has 10 pairs of aluminum electrodes on the high K LiNbO3 Substrate. The acoustic waves generated from input IDT travel to output IDT and convert into electric signals. The sensing area includes of the input, output IDTs and reflectors. The velocity and frequency of acoustic waves change when the mass is on the sensing area. The mass on the electrodes causes the mass-loading effects and decreases the center frequency. The sensitivity curve can be obtained due to the center frequency shift. In this work, the Potassium Chloride (KCL) is used to deposit on the sensing area. Different concentrations of KCL solution lead to different masses and center frequencies on the surface. According to the simulation results, it shows the linearity between the center frequency shift and the thickness of the deposited KCL layer.
Year
DOI
Venue
2010
10.1109/ISCAS.2010.5537659
ISCAS
Keywords
DocType
ISSN
surface acoustic wave resonators,input interdigital transducer,center frequency shift,synchronous reflectors,electric signals,saw resonators,sensitivity curve,aluminum electrodes,linbo3,electrodes,mass sensing,kcl,mass-loading effect saw resonator,surface acoustic wave sensors,surface acoustic wave transducers,output interdigital transducer,acoustic waves,potassium compounds,sensors,resonant frequency,finite element methods,potassium chloride,input output
Conference
0271-4302
ISBN
Citations 
PageRank 
978-1-4244-5309-2
0
0.34
References 
Authors
0
2
Name
Order
Citations
PageRank
Hsu-Cheng Ou100.68
Mona E. Zaghloul27319.65