Title
Long-term tool elimination planning for a wafer fab
Abstract
Wafer manufacturers must make decisions regarding tool elimination due to changes caused by demand, product mixes, and overseas fab capacity expansion. Such a problem is raised by leading semiconductor manufacturers in Taiwan. This paper is aimed at developing a sound mechanism for tool portfolio elimination based on determining which equipment can be pruned. In the proposed mechanism, product mix, wafer output, capital expenditure, tool utilization, protective capacity, and cycle time are taken into the overall evaluation. This paper develops an integer programming model to avoid trial-and-error and to obtain the optimal solution. Compared to the current industry approach, the results show that the proposed mechanism can effectively identify the correct tools for elimination with a large capital savings and little cycle time impact.
Year
DOI
Venue
2008
10.1016/j.cie.2007.09.009
Computers & Industrial Engineering
Keywords
Field
DocType
capacity planning,wafer fab,sound mechanism,tool elimination,tool utilization,correct tool,large capital saving,semiconductor,tool portfolio,long-term tool elimination planning,capital expenditure,cycle time,cycle time impact,proposed mechanism,tool portfolio elimination,semiconductor manufacturing
Product mix,Wafer,Integer programming model,Wafer fabrication,Capacity planning,Portfolio,Engineering,Operations management,Capital expenditure
Journal
Volume
Issue
ISSN
54
3
Computers & Industrial Engineering
Citations 
PageRank 
References 
2
0.42
4
Authors
2
Name
Order
Citations
PageRank
Shu-Hsing Chung111910.75
Ming-Hsiu Hsieh230.78