Title
Fabrication Of A Low Power Cmos-Compatible Zno Nanocomb-Based Gas Sensor
Abstract
In this paper, a novel CMOS-compatible ZnO nanocomb-based gas sensor is presented. Compared with previously reported implementations, the proposed ZnO nanocombs feature multiple conducting channels and much larger effective sensing area, both of which result in dramatically improved sensitivity (6.54 for 250 ppm CO), response time (3.4 min) and recovery time (0.24 min). In addition, by operating the gas sensor at room temperature, additional power-hungry heating components inevitable in traditional implementations are completely removed. This not only leads to low power consumption, but also avoids the high-temperature-caused reliability degradation when integrated with CMOS circuitry.
Year
DOI
Venue
2012
10.1109/ISCAS.2012.6272023
2012 IEEE INTERNATIONAL SYMPOSIUM ON CIRCUITS AND SYSTEMS (ISCAS 2012)
Keywords
Field
DocType
wide band gap semiconductors,cmos integrated circuits,recovery time,low power electronics,zinc oxide,electrodes,sensitivity,response time
Cmos compatible,Wide-bandgap semiconductor,Computer science,Response time,CMOS,Electronic engineering,Degradation (geology),Fabrication,Electrode,Low-power electronics
Conference
Volume
Issue
ISSN
null
null
0271-4302
Citations 
PageRank 
References 
0
0.34
3
Authors
4
Name
Order
Citations
PageRank
Xiaofang Pan100.34
Xiaojin Zhao245.48
Amine Bermak349390.25
Zhiyong Fan421.74