Name
Title | ||
|---|---|---|
High-Cycle Fatigue Of Micromachined Single Crystal Silicon Measured Using A Parallel Fatigue Test System |
Abstract | ||
|---|---|---|
Fatigue testing of micromachined single-crystal silicon was performed using a test system that allowed simultaneous testing of multiple samples. The on-chip test structure, including an actuator, was fabricated using 0.6 mu m resolution lithography to improve the morphological uniformity of the samples. Fatigue test results exhibited a clear tendency for the lifetime to lengthen when the strain amplitude or ambient humidity was decreased. The strain-life relationship at 50% RH was analyzed using the Paris law, and a crack propagation exponent of 19 was obtained. |
Year | DOI | Venue |
|---|---|---|
2007 | 10.1587/elex.4.288 | IEICE ELECTRONICS EXPRESS |
Keywords | Field | DocType |
fatigue test, silicon, MEMS, lifetime, S-N curve, resonator | Composite material,Microelectromechanical systems,Single crystal,Computer science,Resonator,Optics,Humidity,Fracture mechanics,Lithography,Silicon,Actuator,Structural engineering | Journal |
Volume | Issue | ISSN |
4 | 9 | 1349-2543 |
Citations | PageRank | References |
1 | 0.63 | 0 |
Authors | ||
2 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| Tsuyoshi Ikehara | 1 | 4 | 3.70 |
| Toshiyuki Tsuchiya | 2 | 1 | 2.65 |