Paper Info
Title
Design and fabrication of flexible parylene-based inductors with electroplated NiFe magnetic core for wireless power transmission system
Abstract
Integrated flexible parylene-based MEMS inductors were successfully designed, fabricated and analyzed. By elctrodeposition technique, Ni80Fe20 Permalloy with high permeability was acquired as the magnetic core to increase the inductance and quality factor of inductors. Using parylene as substrates, these inductors became more flexible and biocompatible. For small scale inductors, by HFSS simulation, a maximum quality factor of 51.52 was achieved at 3.10 GHz. The inductance of inductors with magnetic core was enhanced by 3.3% than those with air core. As the width of the core increased from 25 μm to 100 μm, the inductance was also increased by 11.3% maximally. For large scale inductors fabricated, the tested maximum quality factor was 110 at 6 MHz. Based on the IC compatible fabrication process, these inductors could be used in wireless power transmission system for implantable medical devices.
Year
DOI
Venue
2012
10.1109/NEMS.2012.6196765
NEMS
Keywords
DocType
Volume
magnetic permeability,maximum quality factor,micromechanical devices,inductor,eictrodeposition technique,nife,air core,inductive power transmission,permalloy,electroplated magnetic core,prosthetics,integrated flexible parylene-based mems inductors,soft magnets,magnetic cores,implantable medical devices,biocompatible,substrates,hfss simulation,electrodeposition,wireless power transmission system,flexible parylene-based inductors design,flexible parylene-based inductors fabrication,ic compatible fabrication process,ni80fe20,inductors,permeability,silicon,power transmission,copper,quality factor,nanoelectromechanical systems
Conference
null
Issue
ISBN
Citations 
null
978-1-4673-1122-9
1
PageRank 
References 
Authors
0.49
1
7
Name
Order
Citations
PageRank
Xuming Sun131.54
Yang Zheng210511.80
Zhongliang Li321.20
Miao Yu4976.36
Quan Yuan510.49
Xiuhan Li654.43
Haixia Alice Zhang72413.99