Name
Abstract | ||
|---|---|---|
The basic properties of synchrotron radiation are described, the design of storage rings to produce synchrotron radiation is outlined, and the criteria for matching storage ring design to the needs of X-ray lithography are discussed. Simple scaling laws are presented showing the benefits for a storage ring of using the higher fields which superconducting magnets are able to provide. Helios 1 is a compact superconducting storage ring built by Oxford Instruments for installation at the IBM Advanced Lithography Facility (ALF). Design choices for superconducting rings are discussed, and the design and construction of Helios are described. Test results from the initial commissioning of Helios at Oxford are presented, but the main data on its performance when installed at ALF are given in another paper in this issue. |
Year | DOI | Venue |
|---|---|---|
1993 | 10.1147/rd.373.0351 | IBM Journal of Research and Development |
Keywords | Field | DocType |
synchrotron radiation,storage ring,ibm advanced lithography facility,compact superconducting storage,oxford instruments,x-ray lithography,superconducting ring,storage ring design,design choice,compact superconducting storage ring,x-ray source,superconducting magnet,magnets,particle accelerators,performance testing,testing,electromagnets,superconducting magnets,electrical equipment,printed circuits,electromagnetic radiation,size,construction,electronic circuits,design,bremsstrahlung | HeliOS,Storage ring,Superconducting magnet,Particle accelerator,Electromagnet,Electronic engineering,Lithography,Synchrotron radiation,Electrical equipment,Physics | Journal |
Volume | Issue | ISSN |
37 | 3 | 0018-8646 |
Citations | PageRank | References |
1 | 1.24 | 0 |
Authors | ||
9 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| M. N. Wilson | 1 | 1 | 1.24 |
| A. I. C. Smith | 2 | 1 | 1.24 |
| V. C. Kempson | 3 | 1 | 1.24 |
| M. C. Townsend | 4 | 1 | 1.24 |
| J. C. Schouten | 5 | 1 | 1.24 |
| R. J. Anderson | 6 | 1 | 1.24 |
| A. R. Jorden | 7 | 1 | 1.24 |
| V. P. Suller | 8 | 1 | 1.24 |
| M. W. Poole | 9 | 1 | 1.24 |