Title
An efficient approach to cross-fab route planning for wafer manufacturing
Abstract
This paper proposes an efficient approach to solve a cross-fab route planning problem for semiconductor wafer manufacturing. A semiconductor company usually adopts a dual-fab strategy. Two fab sites are built neighbor to each other to facilitate capacity-sharing. A product thus may be produced by a cross-fab route; that is, some operations of a product are manufactured in one fab and the other operations in the other fab. This leads to a cross-fab routing planning problem, which involves two decisions-determining the cut-off point of the cross-fab route and the route ratio for each product-in order to maximize the throughput subject a cycle time constraint. A prior study has proposed a method to solve the cross-fab route planning problem; yet it is computationally extensive in solving large scale cases. To alleviate this deficiency, we proposed three enhanced methods. Experiment results show that the best enhanced method could significantly reduce the computational efforts from about 13h to 0.5h, while obtaining a satisfactory solution.
Year
DOI
Venue
2009
10.1016/j.eswa.2009.02.008
Expert Syst. Appl.
Keywords
Field
DocType
efficient approach,semiconductor wafer manufacturing,semiconductor company,cross-fab routing planning problem,computational effort,fab site,cross-fab route planning problem,cross-fab route,enhanced method,route ratio,cut-off point,linear programming,linear program,cycle time,genetic algorithm
Wafer,Data mining,Mathematical optimization,Route planning,Simulation,Capacity sharing,Computer science,Linear programming,Throughput,Time constraint,Genetic algorithm
Journal
Volume
Issue
ISSN
36
8
Expert Systems With Applications
Citations 
PageRank 
References 
1
0.38
4
Authors
3
Name
Order
Citations
PageRank
Muh-Cherng Wu122716.58
Chang-Fu Shih210.38
Chen-Fu Chen3161.69