Title
On-Chip Pseudorandom MEMS Testing
Abstract
This paper presents a Built-In-Self-Test (BIST) implementation of pseudo-random testing for MEMS. The technique is based on Impulse Response (IR) evaluation using pseudo-random Maximum--Length Sequences (MLS). The MLS approach is capable of providing vastly superior dynamic range in comparison to the straightforward technique using an impulse excitation and is thus an optimal solution for measurements in noisy environments and for low-power test signals. The use of a pseudo-random sequence makes the practical on-chip implementation very efficient in terms of the extra hardware required for on-chip testing. We will demonstrate the use of this technique for an on-chip fast and accurate broadband determination of MEMS behaviour, in particular for the characterisation of cantilever MEMS structures, determining their mechanical and thermal behaviour using just electrical tests.
Year
DOI
Venue
2005
10.1007/s10836-005-6353-9
J. Electronic Testing
Keywords
Field
DocType
MEMS testing,impulse response,pseudorandom sequences,BIST
Impulse response,Dynamic range,Microelectromechanical systems,Computer science,Cantilever,MEMS testing,Impulse (physics),Electronic engineering,Real-time computing,Broadband,Pseudorandom number generator
Journal
Volume
Issue
ISSN
21
3
0923-8174
Citations 
PageRank 
References 
8
1.19
4
Authors
4
Name
Order
Citations
PageRank
L. Rufer1356.75
S. Mir281.19
E. Simeu3174.26
C. Domingues481.19