Title
Development of Microsturcture Based on Single-Wall Carbon Nanotube.
Abstract
A fabrication method is devised for integration of long single-wall carbon nanotube (SWNT) into one-dimensional microstructure. Arrays of Me electrode pairs are fabricated on a SiO2 substrate with micro fabrication process; aligned SWNTs with the length up to one millimeter are then synthesized with catalyst of 0.01M FeCl3 ethanol solution. Based on the control of the air flow, at 900 degrees C for 307min with Ar-2 as the carrier gas, ultralong SWNTs formed bridges that electrically connect the electrodes. Contact pad was fabricated with focused ion beam (FIB) techniques. As a demonstration, microstructure based on single-wall nanotube was presented. Sample characterization was carried out with SEM pictures and I-V curves; which shows that this fabrication strategy combining the micro/nano techniques with CVD synthesis method provides the alternative means for the development of microstructure based on nano materials.
Year
DOI
Venue
2009
10.1007/978-3-642-03664-4_182
FUZZY INFORMATION AND ENGINEERING, VOLUME 2
Keywords
Field
DocType
Single-walled carbon nanotube,chemical vapor deposition,microstructure,micro/nano fabrication
Discrete mathematics,Nanotechnology,Microstructure,Nanotube,Computer science,Focused ion beam,Carbon nanotube,Nano-,Electrode,Fabrication,Chemical vapor deposition
Conference
Volume
ISSN
Citations 
62
1867-5662
0
PageRank 
References 
Authors
0.34
0
4
Name
Order
Citations
PageRank
Wu Ying115.09
Zhao-ying Zhou26314.95
Xing Yang315.70
Jin Zhang400.34