Paper Info
Title
Graphical methods for robust design of a semiconductor burn-in process
Abstract
Discrete-event simulation is a common tool for the analysis of semiconductor manufacturing systems. With the aid of a simulation model, and in conjunction with sensitivity analysis and metamodeling techniques, robust design can be performed to optimize a system. Robust design problems often include integer decision variables. This paper shows a graphical approach to robust design that is effective in the presence of discrete or qualitative variables. The graphical robust design methodology was applied to a backend semiconductor manufacturing process. Changes in specific resource capacities and product mix were examined to determine their effect on the level and variance of cycle time and work in process.
Year
DOI
Venue
2001
10.1145/564124.564302
Winter Simulation Conference
Keywords
Field
DocType
semiconductor manufacturing system,robust design,discrete-event simulation,simulation model,sensitivity analysis,robust design problem,backend semiconductor manufacturing process,semiconductor burn-in process,common tool,graphical approach,graphical method,graphical robust design methodology,robustness,design of experiments,semiconductor manufacturing,experimental design,design methodology,cycle time,assembly,process control,discrete event simulation,fabrication,work in process
Systems engineering,Computer science,Work in process,Semiconductor device fabrication,Design methods,Robustness (computer science),Process control,Metamodeling,Design of experiments,Discrete event simulation
Conference
ISBN
Citations 
PageRank 
0-7803-7309-X
0
0.34
References 
Authors
1
5
Name
Order
Citations
PageRank
Scott L. Rosen1476.58
Chad A. Geist200.34
Daniel A. Finke372.37
Jyotirmaya Nanda4706.26
Russell R. Barton560394.99