Paper Info
Title
Pico-Newton Order Force Measurement Using A Calibrated Carbon Nanotube Probe By Electromechanical Resonance
Abstract
Force measurement with pico-Newton (pN) order resolution using a carbon nanotube (CNT) probe, which is calibrated by the electromechanical resonance, is presented. Based on the theoretical analysis, a CNT is suitable material for the sensitive force measurement. A CNT probe is constructed by attaching a CNT to the tip of the commercially available atomic force microscope (AFM) cantilever or tungsten needle probe by the electron-beam-induced deposition (EBID) though the nanorobotic manipulators inside a field-emission scanning electron microscope (FE-SEM). In order to attach a CNT quickly and correctly, CNTs are dispersed in ethanol by ultrasonic waves for several hours and oriented by electrophoresis. The elastic moduli of CNTs are calibrated from electromechanical resonance frequency by applied electrostatic forces. We measured pico-Newton order contact forces with a CNT probe, which is constructed with nanorobotic manipulators, by measuring deformation of a CNT probe from FE-SEM images.
Year
DOI
Venue
2003
10.1109/ROBOT.2003.1241612
2003 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND AUTOMATION, VOLS 1-3, PROCEEDINGS
Keywords
Field
DocType
field emission scanning electron microscope,electrostatics,calibration,atomic force microscope,carbon nanotubes,elastic moduli,scanning electron microscopes,resonance,resonant frequency,electrostatic force,carbon nanotube
Electrostatics,Elastic modulus,Ultrasonic sensor,Nanotechnology,Cantilever,Control theory,Scanning electron microscope,Contact force,Carbon nanotube,Engineering,Resonance,Optoelectronics
Conference
Volume
Issue
ISSN
1
1
1050-4729
Citations 
PageRank 
References 
4
1.22
1
Authors
4
Name
Order
Citations
PageRank
Fumihito Arai1820365.24
Masahiro Nakajima2115.09
Lixin Dong312862.75
Toshio Fukuda49818.96