Paper Info
Title
A method for cycle time estimation of semiconductor manufacturing toolsets with correlations
Abstract
This paper proposes a cycle time estimation method for typical toolsets in Semiconductor Fabrication Facilities (Fabs). Due to sophisticated process flows and requirements of the process, queueing models for toolsets can become very complicated and their performance has been unsatisfactory due to the low accuracy of their results. In this paper, we first study the performance of classical queuing models using a high volume manufacturing toolset as our case study and discuss the potential causes for failure of classical models in predicting its cycle time. Then we propose a new approach for estimating the cycle time of toolsets that have inherent correlation between their arrival and service processes. Finally we apply this method to our case study toolset and show that the accuracy of cycle time estimation is improved significantly compared to use of classical queueing models.
Year
DOI
Venue
2009
10.1109/WSC.2009.5429165
Winter Simulation Conference
Keywords
Field
DocType
high volume manufacturing toolset,typical toolsets,classical model,case study toolset,cycle time estimation,low accuracy,semiconductor manufacturing toolsets,cycle time,cycle time estimation method,classical queueing model,case study,estimation theory,servers,work in progress,estimation,availability,queueing theory,semiconductor manufacturing,computational modeling
Industrial engineering,Simulation,Computer science,Work in process,Semiconductor device fabrication,Server,Queueing theory,Estimation theory,High volume manufacturing
Conference
ISSN
ISBN
Citations 
0891-7736
978-1-4244-5771-7
2
PageRank 
References 
Authors
0.80
3
3
Name
Order
Citations
PageRank
Raha Akhavan-Tabatabaei16611.78
Shengwei Ding222618.81
J. George. Shanthikumar3778151.97