Name
Abstract | ||
|---|---|---|
A metal contact RF MEMS switch was fabricated based on the micro electroplating technology. With the optimized electroplating parameters, the plated Au beam showed very low stress/stress gradient, indicated by a deformation (tip-up) less than 1 μm after release and an annealing process. The pull-in voltage at different temperatures, ranging from 25°C to 90°C, was investigated for switches with and without the annealing process. The switching characteristics were studied under different actuation voltages and temperatures. The DC testing results revealed that a fast, stable (less beam vibration) and temperature-independent switching process could be realized if the actuation voltage was set to be, for example 10%, larger than the pull-in voltage. © 2011 IEEE. |
Year | DOI | Venue |
|---|---|---|
2011 | 10.1109/NEMS.2011.6017349 | NEMS |
Keywords | Field | DocType |
micro electroplating,rf mems switch,switching characteristics,thermal stability,annealing,electroplating | Composite material,Microelectromechanical systems,Voltage,Annealing (metallurgy),Ranging,Beam (structure),Vibration,Deformation (mechanics),Materials science,Electroplating | Conference |
Volume | Issue | Citations |
null | null | 0 |
PageRank | References | Authors |
0.34 | 0 | 2 |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Peigang Deng | 1 | 0 | 1.01 |
| Ping Wang | 2 | 128 | 21.50 |