Name
Abstract | ||
|---|---|---|
We present efficient computational methods for scattered point and meshless analysis of electrostatic microelectromechanical systems (MEMS). Electrostatic MEM devices are governed by coupled mechanical and electrostatic energy domains. A self-consistent analysis of electrostatic MEMS is implemented by combining a finite cloud method-based interior mechanical analysis with a boundary cloud method (BCM)-based exterior electrostatic analysis. Lagrangian descriptions are used for both mechanical and electrostatic analyses. Meshless finite cloud and BCMs, combined with fast algorithms and Lagrangian descriptions, are flexible, efficient, and attractive alternatives compared to conventional finite element/boundary element methods for self-consistent electromechanical analysis. Numerical results are presented for MEM switches, a micromirror device, a lateral comb drive microactuator, and an electrostatic comb drive device. Simulation results are compared with experimental and previously reported data for many of the examples discussed in this paper and a good agreement is observed. |
Year | DOI | Venue |
|---|---|---|
2003 | 10.1109/TCAD.2003.816210 | IEEE Trans. on CAD of Integrated Circuits and Systems |
Keywords | Field | DocType |
electrostatic devices,micromechanical devices,Lagrangian algorithm,MEM switch,boundary cloud method,computational method,coupled electromechanical analysis,electrostatic MEMS,electrostatic comb drive device,finite cloud method,lateral comb drive microactuator,meshless analysis,micromirror device,mixed-domain analysis,scattered point analysis,self-consistent analysis | Domain analysis,Microelectromechanical systems,Computer science,Electric potential energy,Finite element method,Electronic engineering,Comb drive,Boundary element method,Numerical analysis,Cloud computing | Journal |
Volume | Issue | ISSN |
22 | 9 | 0278-0070 |
ISBN | Citations | PageRank |
0-7803-7607-2 | 5 | 1.51 |
References | Authors | |
4 | 2 | |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Gang Li | 1 | 106 | 12.64 |
| Narayan R. Aluru | 2 | 49 | 10.58 |