Title
Pad Over Active (POA) solutions for three metal level BCD5 mixed power process - Design and validation of ESD protections
Abstract
Wire bonding pad schemes are designed to include ESD protections under their structure, in a three-metal mixed power process (BCD5). Several experiments, according to a defined qualification flow, have been performed to proof reliability and manufacturability of such solutions. No relevant failures have been put in evidence on a large sample size (similar to30k pads), demonstrating the feasibility of this option, which can have a significant impact on ICs' cost reduction: first products using Pad Over Active approach show a die size saving up to 10%. (C) 2003 Elsevier Ltd. All rights reserved.
Year
DOI
Venue
2003
10.1016/S0026-2714(03)00245-2
Microelectronics Reliability
Keywords
Field
DocType
process design
Electronic engineering,Process design,Engineering
Journal
Volume
Issue
ISSN
43
9
0026-2714
Citations 
PageRank 
References 
0
0.34
0
Authors
8
Name
Order
Citations
PageRank
A. Andreini131.12
C. Neva200.34
L. Renard300.34
G. Sironi400.34
F. Speroni500.34
L. Sponton611.50
F. Tampellini700.34
R. Tiziani801.01