Name
Abstract | ||
|---|---|---|
The well known technique for separately enhancing topographic and compositional contrast in BS images has been refined. The underlying quantitative theory has been developed, both for acquisition and processing, and tested first in the optical field. The surprisingly good results moved to return to the SEM and to transfer the whole procedure from light to Back Scattered electron images. The preliminary results strongly address for future developments, even for microelectronics, pointing towards FEG SEM operation. (C) 2004 Elsevier Ltd. All rights reserved. |
Year | DOI | Venue |
|---|---|---|
2004 | 10.1016/j.microrel.2004.07.055 | MICROELECTRONICS RELIABILITY |
Field | DocType | Volume |
Iterative reconstruction,Topographic map,Microelectronics,Backscatter,Scanning electron microscope,Image processing,Optics,Engineering,Optical field,3D reconstruction | Journal | 44 |
Issue | ISSN | Citations |
9-11 | 0026-2714 | 2 |
PageRank | References | Authors |
0.77 | 0 | 4 |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Ruggero Pintus | 1 | 108 | 16.12 |
| S. Podda | 2 | 19 | 10.88 |
| Francesca Mighela | 3 | 2 | 0.77 |
| Massimo Vanzi | 4 | 35 | 12.63 |