Name
Title | ||
|---|---|---|
Improving the performance of dispatching rules in semiconductor manufacturing by iterative simulation |
Abstract | ||
|---|---|---|
In this paper, we consider semiconductor manufacturing processes that can be characterized by a diverse product mix, heterogeneous parallel machines, sequence-dependent setup times, a mix of different process types, i.e. single-wafer vs. batch processes, and reentrant process flows. We use dispatching rules that require the estimation of waiting times of the jobs. Based on the lead time iteration concept of Vepsalainen and Morton (1988), we obtain good waiting time estimates by using exponential smoothing techniques. We describe a database-driven architecture that allows for an efficient implementation of the suggested approach. We present results of computational experiments for reference models of semiconductor wafer fabrication facilities. The results demonstrate that the suggested approach leads to high quality solutions. |
Year | DOI | Venue |
|---|---|---|
2004 | 10.5555/1161734.1162084 | Winter Simulation Conference |
Keywords | Field | DocType |
reentrant process flow,suggested approach,semiconductor manufacturing process,lead time iteration concept,different process type,iterative simulation,diverse product mix,time estimate,sequence-dependent setup time,semiconductor wafer fabrication facility,batch process,computer experiment,scheduling,software architecture,semiconductor manufacturing,exponential smoothing,reference model | Exponential smoothing,Reference model,Computer science,Iterative method,Scheduling (computing),Simulation,Semiconductor device fabrication,Scheduling (production processes),Lead time,Batch processing | Conference |
ISBN | Citations | PageRank |
0-7803-8786-4 | 5 | 0.51 |
References | Authors | |
1 | 2 | |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Lars Mönch | 1 | 1034 | 124.98 |
| Jens Zimmermann | 2 | 67 | 7.68 |