Title
Development of generic simulation models to evaluate wafer fabrication cluster tools
Year
DOI
Venue
1992
10.1145/167293.167757
Winter Simulation Conference
Keywords
DocType
ISBN
generic simulation model,wafer fabrication cluster tool,discrete event simulation,system performance,simulation model,semiconductor manufacturing
Conference
0-7803-0798-4
Citations 
PageRank 
References 
5
0.64
0
Authors
2
Name
Order
Citations
PageRank
Neal G. Pierce1101.59
Michael J. Drevna21915.37