Name
Year | DOI | Venue |
|---|---|---|
2010 | 10.1109/ICCA.2010.5524415 | ICCA |
Keywords | Field | DocType |
photolithography,steady state,mathematical model,automatic control,clustering algorithms,robots,lithography,optimization,heuristic algorithm,job shop scheduling,throughput,robot control,semiconductor device modeling,residence time | Wafer,Robot control,Heuristic,Job shop scheduling,Semiconductor device modeling,Transient state,Automatic control,Control engineering,Engineering,Throughput | Conference |
Citations | PageRank | References |
2 | 0.37 | 5 |
Authors | ||
2 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| Kyungsu Park | 1 | 6 | 1.81 |
| James R. Morrison | 2 | 195 | 26.43 |