Name
Abstract | ||
|---|---|---|
Considerable progress in silicon pressure sensors has been made in recent years. This paper discusses three types of vacuum-sealed silicon micromachined pressure sensors that represent the present state of the art in this important area. The devices are a capacitive vacuum sensor, a surface-micromachined microdiaphragm pressure sensor, and a resonant pressure sensor. Vacuum sealing for these devic... |
Year | DOI | Venue |
|---|---|---|
1998 | 10.1109/5.704268 | Proceedings of the IEEE |
Keywords | DocType | Volume |
Silicon,Chemical sensors,Capacitive sensors,Resonance,Bonding,Chemical vapor deposition,Hydrogen,Stability,Electrostatics,Force measurement | Journal | 86 |
Issue | ISSN | Citations |
8 | 0018-9219 | 6 |
PageRank | References | Authors |
1.73 | 0 | 5 |
Name | Order | Citations | PageRank |
|---|---|---|---|
| M. Esashi | 1 | 16 | 3.41 |
| S. Sugiyama | 2 | 6 | 1.73 |
| K. Ikeda | 3 | 41 | 3.95 |
| Y. Wang | 4 | 6 | 1.73 |
| H. Miyashita | 5 | 6 | 1.73 |