Name
Abstract | ||
|---|---|---|
This paper describes factors that constitute a micro-conveying station for assembly of micro-components. It incorporates micro-grippers joined up a micro-conveyer stage. The micro-grippers are fabricated from a mechanical structure in polymer using micro-stereophotolithography process and actuated by shape memory alloy wires. The micro-grippers can work in a space of 10 mm diameter and can carry out opening and closing movements. A neural networks identification and a PID control is proposed to closed-loop control the micro-grippers, and the trajectory control is realized on one finger. The micor-conveyer stage uses surface acoustic waves generated from interdigital transducers to move a slider onto the surface of substrate with a high degree of resolution (nanometer) and several centimeters operation length. A mechanical model for the energy transfer from the acoustic wave to the slider is proposed. A good agreement between the theory and the experiment is obtained. |
Year | DOI | Venue |
|---|---|---|
1997 | 10.1109/IROS.1997.656439 | IROS '97 - PROCEEDINGS OF THE 1997 IEEE/RSJ INTERNATIONAL CONFERENCE ON INTELLIGENT ROBOT AND SYSTEMS: INNOVATIVE ROBOTICS FOR REAL-WORLD APPLICATIONS, VOLS 1-3 |
Keywords | Field | DocType |
surface acoustic wave devices,surface acoustic wave,neural networks,photolithography,identification,closed loop control,shape memory alloy,neural network,shape memory alloys,pid control,polymers,assembly,neural nets,energy transfer,acoustic waves | Transducer,PID controller,Computer science,Surface acoustic wave,Photolithography,Control engineering,Shape-memory alloy,Nanometre,Slider,Acoustic wave | Conference |
Citations | PageRank | References |
2 | 0.41 | 1 |
Authors | ||
6 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| Philippe Hélin | 1 | 2 | 0.41 |
| Mihai Calin | 2 | 10 | 2.69 |
| Véronique Sadaune | 3 | 2 | 0.41 |
| Nicolas Chaillet | 4 | 118 | 23.35 |
| Christian Druon | 5 | 2 | 0.41 |
| Alain Bourjault | 6 | 17 | 3.26 |