Name
Abstract | ||
|---|---|---|
Microfabricated Silicon-On-Insulator (SOI) optical micromirrors are often used in switching applications due to their high reflectivity and low residual stress. In the present study, an industrial bulk micromachining technology based on SOI wafer called the MicraGEM SOI technique is used to fabricate the micromirror. Further, analytical studies were carried out for the static and dynamic characteristics, and are validated using experimental results. A test set-up comprising a laser source and Laser Doppler Vibrometer (LDV) was used for dynamic testing. The microfabrication and test method proposed are simple and can be used to study optical micromirrors of any size. |
Year | DOI | Venue |
|---|---|---|
2008 | 10.1504/IJISTA.2008.018173 | IJISTA |
Keywords | Field | DocType |
laser doppler vibrometer,analytical study,dynamic evaluation,test method,present study,dynamic characteristic,dynamic testing,test set-up,soi wafer,micragem soi technique,optical micromirrors,microfabrication,bulk micromachining,silicon on insulator,statics,resonant frequency,dynamics | Laser Doppler vibrometer,Silicon on insulator,Wafer,Test method,Bulk micromachining,Control engineering,Dynamic testing,Interferometry,Electronic engineering,Engineering,Optoelectronics,Microfabrication | Journal |
Volume | Issue | Citations |
5 | 1/2 | 0 |
PageRank | References | Authors |
0.34 | 0 | 4 |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Jianliang You | 1 | 0 | 0.34 |
| Avinash K. Bhaskar | 2 | 0 | 0.68 |
| Muthukumaran Packirisamy | 3 | 1 | 4.68 |
| Rama B. Bhat | 4 | 4 | 2.76 |