Name
Abstract | ||
|---|---|---|
•A new approach for recording EBIC embedded in a Dual Beam system is presented.•The technique was applied to drive TEM preparation in FA studies of a leaky junction.•Possibility of 3D EBIC tomography of P-N junction is showed. |
Year | DOI | Venue |
|---|---|---|
2013 | 10.1016/j.microrel.2013.06.023 | Microelectronics Reliability |
Field | DocType | Volume |
Compound semiconductor,Electronic engineering,Beam (structure),Engineering,Photonics,Electron beam-induced current,Silicon,Electron | Journal | 53 |
Issue | ISSN | Citations |
9 | 0026-2714 | 1 |
PageRank | References | Authors |
0.41 | 1 | 4 |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Massimo Vanzi | 1 | 35 | 12.63 |
| S. Podda | 2 | 19 | 10.88 |
| E. Musu | 3 | 1 | 0.41 |
| R. Cao | 4 | 1 | 0.41 |