Title
Mems Q-Factor Enhancement Using Parametric Amplification: Theoretical Study and Design of a Parametric Device
Abstract
Parametric amplification is an interesting way of artificially increasing a MEMS Quality factor and could be helpful in many kinds of applications. This paper presents a theoretical study of this principle, based on Matlab/Simulink® simulations, and proposes design guidelines for parametric structures. A new device designed with this approach is presented together with the corresponding FEM simulation results.
Year
Venue
Keywords
2008
Clinical Orthopaedics and Related Research
quality factor
DocType
Volume
ISSN
Journal
abs/0802.3
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
Citations 
PageRank 
References 
0
0.34
0
Authors
5
Name
Order
Citations
PageRank
Laetitia Grasser100.34
Hervé Mathias2125.30
Fabien Parrain3346.69
Xavier Le Roux433.14
Jean-paul Gilles542.56