Name
Abstract | ||
|---|---|---|
As the, effective deployment of system production capacity and operational capability becomes critical for competitive semiconductor manufacturing, currently, there is an increasing interest toward the development of a control framework which allows effective and efficient operation of the emerging 300mm wafer fabs. In this paper, a colored. Petri net-based approach is taken to develop such a distributed, event-driven 300mm fab controller. The key element of the proposed controller design is thr distribution of control function to the constituent components of the 300mm fab while maintaining the logical correctness and efficiency of the fab behavior. Furthermore, in order to achieve the viability of the resulting control scheme, the. proposed approach seeks to incorporate detailed operational characteristics of the 300mm fabs. including botching. setups, reworks, maintenances, machine, failures, and complex resource allocation dynamics due to the routing flexibility and auxiliary resource sharing. The proposed approach is demonstrated through a small-scale example, modeling the operation of a 300mm fab bay. |
Year | Venue | DocType |
|---|---|---|
2001 | 2001 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND AUTOMATION, VOLS I-IV, PROCEEDINGS | Conference |
ISSN | Citations | PageRank |
1050-4729 | 0 | 0.34 |
References | Authors | |
0 | 5 | |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Jong Hun Park | 1 | 6 | 2.55 |
| Spyros A. Reveliotis | 2 | 140 | 18.02 |
| Douglas A. Bodner | 3 | 39 | 10.49 |
| Chen Zhou | 4 | 0 | 0.34 |
| Leon F. McGinnis | 5 | 494 | 50.09 |