Title | ||
---|---|---|
Fabrication of two-point-supported annular-type microresonators with capacitive transducer gaps. |
Year | DOI | Venue |
---|---|---|
2011 | 10.1109/NEMS.2011.6017452 | NEMS |
Keywords | DocType | Citations |
nodal point,capacitive sensors,resonant frequency,silicon,q factor,finite element analysis | Conference | 0 |
PageRank | References | Authors |
0.34 | 0 | 5 |
Name | Order | Citations | PageRank |
---|---|---|---|
S. Murakami | 1 | 4 | 1.26 |
M. Konno | 2 | 0 | 0.34 |
Tsuyoshi Ikehara | 3 | 4 | 3.70 |
Ryutaro Maeda | 4 | 1 | 3.52 |
Takashi Mihara | 5 | 2 | 1.58 |