Title
Fabrication of two-point-supported annular-type microresonators with capacitive transducer gaps.
Year
DOI
Venue
2011
10.1109/NEMS.2011.6017452
NEMS
Keywords
DocType
Citations 
nodal point,capacitive sensors,resonant frequency,silicon,q factor,finite element analysis
Conference
0
PageRank 
References 
Authors
0.34
0
5
Name
Order
Citations
PageRank
S. Murakami141.26
M. Konno200.34
Tsuyoshi Ikehara343.70
Ryutaro Maeda413.52
Takashi Mihara521.58