Title
Failure mechanisms in thermal inkjet printhead analyzed by experiments and numerical simulation
Abstract
This paper presents a failure analysis result for enhancing the reliability of thermal inkjet printhead. A novel inkjet printhead is fabricated using MEMS process, and we analyze the failure mechanism of inkjet head based on detailed experimental observations and numerical simulations. The failures presented in this work showed three primary factors influencing the failure modes and lifetime of printhead; bubble cavitation damage, thermal fatigue, and electromigration of heater. The design modification of micro heater to avoid an early stage of failure by electromigration yields the reliability enhancement of thermal inkjet printhead.
Year
DOI
Venue
2005
10.1016/j.microrel.2004.12.009
Microelectronics Reliability
Keywords
Field
DocType
numerical simulation,electromigration,failure analysis
Thermal,Computer simulation,Durability,Microelectromechanical systems,Mechanical engineering,Engineering,Thermal fatigue,Electromigration,Cavitation,Reliability engineering,Structural engineering,Bubble
Journal
Volume
Issue
ISSN
45
3
0026-2714
Citations 
PageRank 
References 
1
0.63
0
Authors
7
Name
Order
Citations
PageRank
Ji-hyuk Lim110.63
Keon Kuk210.63
Seung-joo Shin310.63
Seog-soon Baek410.63
Young Jae Kim5284.62
Jong-woo Shin610.63
Yongsoo Oh711.30