Paper Info
Title
IR characterization of carbon-black for thermopile infrared detectors
Abstract
In this paper, the p-poly-Si/Al thermopile infrared detector, with a single layer of low-stress SiNx membrane, instead of previous designed thin sandwich layer membrane of SiO2-Si3N4 is presented. Meanwhile, we investigate the influence of carbon-black coating on the output response of the detector. Infrared (IR) transmission spectra measurements made on absorbing area of the detector with carbon-black and without carbon-black reveal that IR absorbance to different wavelengths is enhanced distinctly, especially from 1μm to 8μm, when carbon-black is evaporated on the surface of the detector. Based on the IR transmission spectra and the output voltage measurements, the response sensitivity and the specific detecitivity of the detector without carbon-black are 12.45V/W, 4.64×107 cmHz(1/2) W-1, respectively; while the response sensitivity and the specific detecitivity of the detector with carbon-black are 13.30 V/W, 4.96×107 cmHz(1/2) W-1. The output response of the detector increases by 6.9%, when carbon-black is applied to the surface of the absorbing area of the detector.
Year
DOI
Venue
2010
10.1109/NEMS.2010.5592246
NEMS
Keywords
Field
DocType
sensitivity,thermopiles,voltage measurement,infrared transmission spectra measurement,low-stress membrane,specific detecitivity,aluminium,response sensitivity,infrared spectra,silicon,infrared detectors,ir transmission spectra,thermopile infrared detector,detectivity,si-al,carbon-black coating,detectors,temperature measurement,infrared,carbon black
Analytical chemistry,Absorbance,Infrared spectroscopy,Infrared,Optoelectronics,Temperature measurement,Materials science,Detector,Thermopile,Wavelength,Infrared detector
Conference
Volume
Issue
ISBN
null
null
978-1-4244-6543-9
Citations 
PageRank 
References 
0
0.34
1
Authors
5
Name
Order
Citations
PageRank
Chenyang Xue1169.07
Kaiqun Wang200.34
Ting Liang3125.40
Wendong Zhang413733.61
Jijun Xiong511835.50