Title | ||
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Sensitivity analysis and structure design for tri-mass structure micromachined gyroscope |
Abstract | ||
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The design method for increasing gyroscope sensitivity is studied. By designing lumped parameter models of uni-mass, bi-mass, and tri-mass gyroscope structures, the influence between sensitivity and model parameters is analyzed. These three gyroscope structures are optimized in the same condition and the result shows that the sensitivity ratio of the three structures is 1:7:800 in the condition of frequency matching. Tri-mass structure's high sensitivity shows its advantage in high performance design. |
Year | DOI | Venue |
---|---|---|
2009 | 10.1109/NEMS.2009.5068541 | NEMS |
Keywords | Field | DocType |
tri-mass gyroscope structure,gyroscope sensitivity,micromachined gyroscope,tri-mass structure,model parameter,gyroscope structure,design method,frequency matching,sensitivity ratio,sensitivity analysis,high sensitivity,high performance design,structure design,mathematical model,data mining,gyroscopes,force,resonant frequency,sensitivity,micromachining | Composite material,Gyroscope,Surface micromachining,High performance design,Mechanical engineering,Structure design,Materials science | Conference |
ISSN | Citations | PageRank |
2474-3747 | 1 | 0.46 |
References | Authors | |
0 | 5 |
Name | Order | Citations | PageRank |
---|---|---|---|
Liqiang Xie | 1 | 7 | 3.76 |
Dingbang Xiao | 2 | 5 | 4.75 |
Haoxu Wang | 3 | 4 | 2.37 |
Xuezhong Wu | 4 | 27 | 12.46 |
Sheng-Yi Li | 5 | 17 | 7.33 |