Title
Sensitivity analysis and structure design for tri-mass structure micromachined gyroscope
Abstract
The design method for increasing gyroscope sensitivity is studied. By designing lumped parameter models of uni-mass, bi-mass, and tri-mass gyroscope structures, the influence between sensitivity and model parameters is analyzed. These three gyroscope structures are optimized in the same condition and the result shows that the sensitivity ratio of the three structures is 1:7:800 in the condition of frequency matching. Tri-mass structure's high sensitivity shows its advantage in high performance design.
Year
DOI
Venue
2009
10.1109/NEMS.2009.5068541
NEMS
Keywords
Field
DocType
tri-mass gyroscope structure,gyroscope sensitivity,micromachined gyroscope,tri-mass structure,model parameter,gyroscope structure,design method,frequency matching,sensitivity ratio,sensitivity analysis,high sensitivity,high performance design,structure design,mathematical model,data mining,gyroscopes,force,resonant frequency,sensitivity,micromachining
Composite material,Gyroscope,Surface micromachining,High performance design,Mechanical engineering,Structure design,Materials science
Conference
ISSN
Citations 
PageRank 
2474-3747
1
0.46
References 
Authors
0
5
Name
Order
Citations
PageRank
Liqiang Xie173.76
Dingbang Xiao254.75
Haoxu Wang342.37
Xuezhong Wu42712.46
Sheng-Yi Li5177.33