Name
Title | ||
|---|---|---|
Performance Evaluation and Schedule Optimization of Multi-Cluster Tools with Process Times Uncertainty |
Abstract | ||
|---|---|---|
Performance evaluation and schedule optimization of cluster tools is challenging, especially when the process times are with uncertainty. In this paper, the critical path method (CPM) is used to analyze the throughput of multi-cluster tools with fixed action sequence. Slacks of non-critical path actions are studied and integrated to find the average cycle time of the cluster tool. A thin film tool from Novellus is used as an example to explain this methodology |
Year | DOI | Venue |
|---|---|---|
2006 | 10.1109/COASE.2006.326864 | CASE |
Keywords | Field | DocType |
novellus,optimisation,scheduling,critical path method,multi-cluster tools,fixed action sequence,semiconductor device manufacture,critical path analysis,schedule optimization,throughput analysis,performance evaluation,process times uncertainty,thin film tool,critical path,network model,cycle time,graph clustering,thin film,indexing terms | Mathematical optimization,Scheduling (computing),Critical path method,Throughput,Engineering | Conference |
ISSN | ISBN | Citations |
2161-8070 | 1-4244-0311-1 | 1 |
PageRank | References | Authors |
0.47 | 4 | 4 |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Shengwei Ding | 1 | 226 | 18.81 |
| Jingang Yi | 2 | 486 | 60.90 |
| Mike Tao Zhang | 3 | 146 | 13.47 |
| Raha Akhavan-Tabatabaei | 4 | 66 | 11.78 |