Name
Abstract | ||
|---|---|---|
The atomic force microscope (AFM), with its ability to image and modify surfaces on the nanometer scale, offers the potential for simple, compact, high-density data storage devices. At the heart of the technique is a microfabricated cantilever with a sharp tip on the end. Using modern micromachining techniques, it is possible to batch fabricate cantilevers with tips that are sharp on the scale of ... |
Year | DOI | Venue |
|---|---|---|
1999 | 10.1109/5.763314 | Proceedings of the IEEE |
Keywords | DocType | Volume |
Atomic force microscopy,Memory,Surface topography,Nanoscale devices,Heart,Micromachining,Piezoresistance,Silicon,Heating,Thermomechanical processes | Journal | 87 |
Issue | ISSN | Citations |
6 | 0018-9219 | 4 |
PageRank | References | Authors |
2.90 | 1 | 6 |