Name
Abstract | ||
|---|---|---|
Long-term stability of a dc voltage standard based on a capacitive microelectromechanical system (MEMS) is investigated. Square-wave voltage actuation was used to cancel the effect of slow charging appearing in the dielectric layers and capacitor plate surfaces of the MEMS capacitor. The key properties of a MEMS capacitor and the operational principle and the measurement results of the apparatus t... |
Year | DOI | Venue |
|---|---|---|
2011 | 10.1109/TIM.2011.2144230 | IEEE Transactions on Instrumentation and Measurement |
Keywords | Field | DocType |
Micromechanical devices,Voltage measurement,Capacitors,Capacitance,Electrodes,Capacitance measurement,Voltage control | Capacitor,Capacitance,Microelectromechanical systems,Voltage,Voltage reference,Control engineering,Capacitive sensing,Electronic engineering,Decoupling capacitor,Electrical engineering,Mathematics,Voltage divider | Journal |
Volume | Issue | ISSN |
60 | 7 | 0018-9456 |
Citations | PageRank | References |
0 | 0.34 | 4 |
Authors | ||
2 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| Jussi Kaasalainen | 1 | 0 | 0.34 |
| Antti Manninen | 2 | 5 | 1.11 |