Abstract | ||
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In this paper, we develop a methodology for the steady-state performance optimization, in terms of the sensitivity to disturbances, for Lur’e type nonlinear control systems. For linear systems, steady-state performance is well defined and related to frequency-domain characteristics. The definition and analysis of steady-state performance of nonlinear systems are, however, far from trivial. For a practically relevant class of nonlinear systems and disturbances, this paper provides a computationally efficient method for the computation of the steady-state responses and, therewith, for the efficient performance assessment of the nonlinear system. Based on these analysis tools, a strategy for performance optimization is proposed, which can be employed for the optimized tuning of system and controller parameters. The results are illustrated by application to a variable gain controlled short-stroke wafer stage of a wafer scanner. |
Year | DOI | Venue |
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2013 | 10.1016/j.automatica.2013.04.017 | Automatica |
Keywords | Field | DocType |
Steady-state behavior,Nonlinear systems,Performance optimization,Variable gain control | Well-defined,Control theory,Nonlinear system,Linear system,Control theory,Nonlinear control,Control engineering,Scanner,Steady state,Mathematics,Computation | Journal |
Volume | Issue | ISSN |
49 | 7 | 0005-1098 |
Citations | PageRank | References |
3 | 0.40 | 9 |
Authors | ||
4 |
Name | Order | Citations | PageRank |
---|---|---|---|
Alexey V. Pavlov | 1 | 16 | 1.29 |
B. G. B. Hunnekens | 2 | 13 | 2.48 |
Nathan van de Wouw | 3 | 1173 | 115.49 |
Henk Nijmeijer | 4 | 1191 | 161.43 |