Title
Excursion Yield Loss and Cycle Time Reduction in Semiconductor Manufacturing
Abstract
The importance of cycle time reduction is well known to the semiconductor manufacturing industry in the sense of reduced inventory costs and faster response to the market. Less emphasized is the fact that the overall die yield is also closely related to cycle time. In particular, some yield losses are due to “excursions,” when process or equipment shift out of specifications. While some and perhap...
Year
DOI
Venue
2011
10.1109/TASE.2010.2041450
IEEE Transactions on Automation Science and Engineering
Keywords
Field
DocType
Semiconductor device manufacture,Production,Fabrication,Manufacturing industries,Costs,Inspection,Pulp manufacturing,Computer aided manufacturing,Life testing,Manufacturing processes
Revenue,Production cycle,Mathematical optimization,Life cycle costing,Industrial engineering,Semiconductor device modeling,Computer science,Semiconductor device fabrication,Inventory control,Excursion,Semiconductor materials,Reliability engineering
Journal
Volume
Issue
ISSN
8
1
1545-5955
Citations 
PageRank 
References 
10
1.56
0
Authors
2
Name
Order
Citations
PageRank
Robert C. Leachman17710.00
Shengwei Ding222618.81