Title
Development of an epitaxial lift-off technology for II-VI nanostructures using ZnMgSSe alloys
Abstract
An epitaxial lift-off technique for removing wide bandgap II-VI heterostructures from GaAs substrates has previously been demonstrated using lattice-matched MgS as the sacrificial layer. However, using MgS as an etch release layer prevents its use as a wide bandgap barrier in the rest of the structure. Here, we describe the use of the etch-resistant alloy Zn.2Mg.8S.64Se.36 which we have developed as a replacement for MgS. We demonstrate that this alloy can be grown by MBE together with MgS in heterostructures and used as a barrier for ZnSe. A ZnSe quantum well with Zn.2Mg.8S.64Se.36 barriers shows no decrease in photoluminescence intensity after the etching process but shows a shift in emission wavelength associated with the changing strain state.
Year
DOI
Venue
2009
10.1016/j.mejo.2008.06.024
Microelectronics Journal
Keywords
Field
DocType
sacrificial layer,znse quantum,etch release layer,znmgsse alloy,wide bandgap ii-vi heterostructures,wide bandgap barrier,epitaxial lift-off technique,lattice-matched mgs,emission wavelength,etch-resistant alloy,epitaxial lift-off technology,gaas substrate,quantum well,quantum wells
Molecular beam epitaxy,Wide-bandgap semiconductor,Etching,Band gap,Electronic engineering,Engineering,Heterojunction,Quantum well,Epitaxy,Photoluminescence
Journal
Volume
Issue
ISSN
40
3
Microelectronics Journal
Citations 
PageRank 
References 
0
0.34
0
Authors
7
Name
Order
Citations
PageRank
R. Moug100.34
C. Bradford200.34
A. Curran300.34
F. Izdebski400.34
I. Davidson500.34
K. A. Prior600.34
R. J. Warburton710.82